Development of Research on Super-precision Measurement Techniques for circle and cylindrical contour

摘要

At the beginning, it is presented that several theoretical and key technique problems along super-precision and nanometer measurement for circle and cylindrical contour, including: periodic reappearance of straight line datum movement; harmonic suppression in the measurement for circle contoru; datum error's recognition and separation in the measurement for cylindrical contour; the problem of informaiton integrality in the measurement for cylindrical contour.