Numerous studies have been carried out to develop ternary CoNiP magnetic thin films because of their hard magnetic properties with potential applications,including high density recording media [1-2] and microelectromechanical system(MEMS)devices [3-4].Electrochemical processes(electrodeposition and electroless deposition)have many advantages over vacuum processes:low cost,easy scale up and maintenance,low operating temperature,and the ability to"tailor"deposit structure and properties.Since Iwasaki and Nakamura proposed the potential of high density recording media by perpendicular magnetic recording [5],the electroless deposition process has been studied by a number of investigators to develop CoNiP magnetic thin films for perpendicular magnetic recording media [2,6].However, few electrodeposition studies have been conducted on perpendicular magnetic recording media [7].Hard and soft magnetic materials have recently been incorporated into MEMS devices,including microactuators,sensors, micromotors and frictionless microgears.
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