EFFECT OF CsF- AND HFCONCENTEA-TIONS ON ANODIC BEHAVIOR OF NICKEL IN THE MIXED MELTS OF (CH_3)_4NF centre dot mHF AND CsF centre dot 2HF

摘要

Perfluorotrimethylamine,(CF_3)_3N,is expected to be a new gas for dry etching of a semiconductor,being able to obtained by electrolysis of trimethylamine,(CH_3)_3N,in anhydrous HF with the Ni anode [l].The mixed melt of (CH ) NF-mHF and CsF centre dot 2HF is used as the electrolyte at room temperature in order to develop a new process for electrolytic production of (CF_3)_3N.