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Head-medium spacing measurements using a phase comparison between two fringe patterns formed by Michelson laser interferometry through a glass disk

机译:使用由Michelson激光干涉法通过玻璃盘形成的两个边缘图案之间的相位比较的头介质间距测量

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Head-medium spacing measurements using a phase comparison between two fringe patterns (PCMI: Phase Comparison Michelson Interferometry) was extended to a case using a glass disk in place of actual disks. In the original PCMI, fringe patterns wereformed over a slider back surface and disk surface, which is advantageous in that there was no necessity for a calibration using the First-order Reinforcement Interference (FRI) and is applicable as regards spacing far less than the spacing where the FRIforms, The present extension enables PCMI in the case of flying heads having no reflective space on their back surfaces. Also, the extended PCMI permits direct measurements of absolute spacing values without the needs for any calibration nor anyoperation, which contrasts favorably with the original PCMI wherein relative spacing values can be measured.
机译:使用两个边缘图案(PCMI:相位比较迈克隆干涉测定法之间的相位比较的头介质间距测量延伸到使用玻璃盘代替实际盘的情况。在原始PCMI中,边缘图案在滑块后表面和盘表面上形成,这是有利的,因为不需要使用一阶加强干扰(FRI)校准,并且可以在远低于间距的间距中适用在进说,当前延伸的情况下,在其背面上没有反射空间的飞行器的情况下,可以使PCMI能够。此外,扩展的PCMI允许直接测量绝对间距值,而无需任何校准和任何操作,这对原始PCMI有利地对比可以测量相对间隔值的原始PCMI。

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