Comprehensive characterisation of a FEGTEM

摘要

Several improvements have been made in the methodology of determining imaging aberrations - especially three-fold astigmatism, coma and spherical aberration - from measurements of image shifts and diffractogram shapes, to characterise a microscope recently installed in Oxford. The combined use of shift and diffractogram measurements has been develop to address tilt calibration problems, and a new approach based on simpler measurements devised.