Possible artefacts in measurement of hardness and elastic modulus on superhard coatings and the verification of the correctness fo the data

摘要

Measurements of the hardness and Young's modulus of superhard coatings (H_v>=40 Gpa) by means of automated load-depth-sensing indentation technique can be subject to a number of errors that are discussed and exmplified here.Only load-independent values of hardness for loads large than 30-50 mN can be considered reliable when the technique of Doerner and Nix (liner extrapolation of the unloading curve) is used to determine the corrected indentation depth.The results are compared with values of Vickers hardness calculated from the contact area of the remaining plastic deformation which was measured by means of calibrated scanning electron microscope.The values of young's modulus obtained from the indentation are close to the zero-pressure shear modulus of the coatings as measured by means of Vibrating Reed and surface Brillouin scattering techniques.