Laser cleaning of nanoparticles from solid surfaces

摘要

The experimental analysis of dry laser cleaning efficiency is done for certified spherical particle (SiO_2,5.0,2.5,1.0 and 0.5mum) from different substrates (Si,Ge and NiP).The influence of different options (laser wavelength,incident angle,substrate properties,i.e.type of material,surface roughness,etc) on the cleaning efficiency is presented in addition to commonly analyzed options (cleaning efficiency versus laser fluence and particle size).Found laser cleaning efficiency demonstrates a great sensitivity to some of these options (e.g.laser wavelength,angle of incidence,etc).