Decomposition of trichloroethylene by microwave-induced-plasma generated from SiC ceramics under atmospheric pressure

摘要

Effect of O{sub}2 or water addition on both the behavior of microwave induced Ar plasma generated from SiC ceramics and the decomposition behavior of trichloroethylene by the Ar plasma have been investigated in flowing Ar containing trichloroethylene under atmospheric pressure. The microwave induced Ar plasma could be generated even in the atmosphere containing trichloroethylene, but emission peaks assigned to C atoms were observed in addition to those assigned to Ar atoms. Addition of O{sub}2 to flowing Ar containing trichloroethylene resulted in an appearance of a peak assigned to O atoms and disappearance of peaks assigned to C atoms. It was also confirmed that trichloroethylene could be completely decomposed or oxidized with relatively low energy consumption by the microwave induced Ar plasma in the flowing Ar containing an appropriate amount of O{sub}2, compared with its thermal decomposition.