On-line TOC analyzers have represented critical measurements in high-purity water for many years. This is especially true in microelectronics facilities where high-purity water is considered a critical component in the production process, and not just an ancillary tool. While resistivity measurements have proved their worthiness and reliability as a screening tool to detect ionic upsets, this confidence is based on 1) decades of reliable use and 2) a rapid, on-line, in-line detection methodology. Upon an ionic upset, a response in a couple seconds is typical and offers a means to provide immediate warning to the facility. End users have showed an increased confidence in the utility of TOC analyzers, as demonstrated by the increased number of TOC analyzers in service. Since a TOC analyzer cannot distinguish the specific organic contaminant, its most promising contribution is as an organic screening device, the organic counterpart to resistivity. But as a screening tool, the long cycle times (5 to 10 minutes typical) and the "batch" sampling methodology of traditional TOC analyzers fall far behind state-of-the-art resistivity instrumentation. A new, rapid TOC monitoring technology has been under development and in use to measure TOC on a truly continuous basis with typical response time of 15 seconds. This technology uses continuous flow without waiting for valves to open/close, nor are any chemicals utilized for sample oxidation. Furthermore, this technology addresses specific issues of water conservation and rapid detection. Live applications of this technology shall be presented.
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