Ultrahigh Purity Sampling System to Improve the Sampling of Wet Tools

摘要

The trend to focus responsibility for chemical purity throughout the delivery system upon fewer suppliers, is resulting in chemical managers being required to ensure purity not only at the point of delivery, but throughout the bulk chemical distribution system and, increasingly, at the point of use at the tool itself. At the same time, evolution in the design of wet benches combined with the trend in facilities design to the containment of each in its own minienvironment, is increasing the isolation of tools from operators. While this serves to reduce contamination and safety risks, it makes sampling of chemicals at these tools progressively more arduous. This latter trend makes the chemical managers' new-found responsibilities all the more difficult to fulfill. To address this issue, a new ultrahigh purity sampling system has been developed to facilitate access to wet tools for chemical sampling. Constructed of high purity PFA, the system is compatible with virtually all process chemicals, introduces no extraneous contaminants, and is safe and easy to use. The system is mechanically robust and easily cleaned for re-use with a resulting low cost of ownership. Analytical data are presented to demonstrate the ultra-low levels of contaminants associated with use of this system.