Temporal characteristic of KrF excimer spectrum generated by discharge exciting without additional fluorine donor

摘要

Without additional fluorine donor, the Kr/Ne mixture was excited in a excimer laser with Teflon surface preionization plates. The relative UV spectrum was obtained by ways of spectrograph and scanning. The formation of KrF excimer was affirmed. The temporal characteristic of relevant spectra was analyzed. It was found that the lasting time of the KrF excimer emission is about five times as much as that of the discharge current pulse. This indicates that the main process of forming KrF excimer is harpooning reaction but the ion combined reaction that is the main process in general KrF laser.