Mechanical characterization of submicron polytetrafluoroethylene (PTFE) thin films

摘要

This study reports the results of an investigation of the mechanical properties of polytetrafluoroethylene (PTFE) thin films on silicon substrates in the 0.5 to 15 mu m thickness regime using frequency specific depth-sensing indentation. All measurements were conducted at an excitation frequency of 45 Hz using a constant (l/P dP/dt) load ramp of 0.1 s~(-1). The modulus of the PTFE at a depth of 5