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Stress controlled magnetomechanical instability in terfenol-D thin films

机译:薄膜-D薄膜中应力控制的磁机械不稳定

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The magneto-mechanical properties of Terfenol-D thin films deposited on Si substrates were studied by magnetic and mechanical measurements of film/substrate composite cantilevers. The DELTA E effect and mechanical damping of the film were measured simultaneously. The stress in the film was controlled by annealing and deposition at different temperatures as well by the selection of the substrate material below the recrystallization temperature and determined to vary from - 500 MPa, compression, in as deposited films to +480 MPa, tension, in annealed films. This paper highlights the magneto-mechnaical response of tensioned 1 mu m nanocrystalline Terfenol-D films on 50 mu m Si substrates display a pronounced damping maximum at a magnetic field of about 1.5kOe oriented perpendicular to the plane of the film. The phenomenon is critically dependent on the orientation of the magnetic field and is the result of a magneto-mechanical instability in the Terfenol film.
机译:通过薄膜/基板复合悬臂器的磁性和机械测量研究了沉积在Si底板上的Te​​rfenol-D薄膜的磁力性能。同时测量薄膜的ΔE效应和机械阻尼。通过在不同温度下的退火和沉积以及在重结晶温度下方的基板材料中选择并测定以从-500MPa,压缩,在沉积薄膜中的沉积薄膜中的不同温度下来控制膜中的应力。退火薄膜。本文突出了50μMSI基板上的张紧1μm纳米晶二酚-d膜的磁化机制响应在垂直于薄膜平面的约1.5koe定向的磁场下显示出明显的阻尼最大值。该现象是批判性地取决于磁场的取向,并且是萜烯酚薄膜中磁性机械不稳定性的结果。

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