Real time in-situ laser reflectometry was used to investigate changes in surface morphology observed during the nucleation of oriented diamond on Ni in a hot filament chemical vapor deposition reactor. Characteristic features observed in the intensities of reflected and scattered light were interpreted by comparison with scanning electron mcrographs of the diamond seeded substrates quenched at sequential stages of the process. Based on this analysis, a proces was developed in which the scattered light signal was used as a steering parameter. Using this rpocess, oriented nucleating and growth of diamond on Ni can be repeatedly acieved. For the pupose of both countering the loss of carbon atoms and to maximize the denity of oriented diamond, different concentrations of methane were added during the high temperature annelaing stage to find the optimized conditions. It was found that 0.5
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