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A ball diameter-measuring instrument in a gauge block interferometer

机译:压块干涉仪中的球直径测量仪器

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An instrument for the measurement of ball diameters in the 0.5-20 mm range in a gauge block interferometer is realized. The measurement principle is that the ball is positioned between an optical flat and a calibrated gauge block. The total length (ball + gauge block) is measured in a gauge block interferometer. Special precautions are taken which enable a parallel adjustment of the gauge block relative to the optical flat and a proper measurement of the deformations due to the measuring force. The parallelism is adjusted using two piezo translators. The parallelism is adjusted while viewing the interference patterns on the gauge block and the optical flat. The measuring force can be varied in the 0.03 - 2.35 N range. The applied force is calibrated. Experiments show that commonly used formulas to calculate the ball indentation as a function of the applied force are approximately correct; this instrument however provides a direct means to measure this dependence and to apply a proper extrapolation to zero measuring force. The design is rather compact (90x70x150 mm) so it will fit in commonly used gauge block interferometers. The uncertainty which can be achieved is less than 0.1 micrometer.
机译:实现了用于测量块干涉仪的0.5-20mm范围内的球直径测量的仪器。测量原理是球位于光学平板和校准量块之间。在规格块干涉仪中测量总长度(球+尺寸块)。采用特殊预防措施,其能够相对于光平的光平和测量块的并联调节,以及由于测量力而对变形的适当测量。使用两个压电翻译器调整并行性。在测量块上的干涉图案和光学平面上进行调整并行性。测量力可以在0.03-2.35N范围内变化。校准施加的力。实验表明,常用的公式以计算作为施加力的函数的球凹口近似是正确的;然而,该仪器提供了一种直接手段来测量这种依赖性并施加适当的外推到零测量力。设计相当紧凑(90x70x150 mm),因此它将适合常用的规格块干涉仪。可以实现的不确定性小于0.1微米。

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