Fabrication processes for polymer-based microfluidic analytical devices

摘要

Fabrication methods for polymer-based microanalytical devices are described. Productin of microchannels is based on laser micromachining methods, and are produced either by directly milling channels into substrate faces, or by sandwiching thin pieces of machined polyimide between solid surfaces. Use of a multilayer laminated process for some of the devices improves device compactness and efficiency of fluid flow.