Testing method on nanometer-grade true microprofile of optical surface

摘要

In this paper, the new method on testing and evaluating of optical surface microprofile using Atomic Force Microscope (AFM), which has both good vertical and lateral resolution. The nanometer-grade microprofile of super-smooth optical surface can be obtained using AFM method, but can't by classical interferometer, as the latter has a poor lateral resolution. Some tested examples of optical surface are shown in the paper. The microprofile images are viewed in monitor and printed in microcomputer.