New out-of-plane light attenuation scheme based on surface micromachined pop-up mirror and movement translation micromechanism

摘要

In this paper we study a new out-of-plane light attenuation scheme based on a surface micromachined pop-up mirror and movement translation micromechanism. New movement translation micromechanism (MTM) is proposed to amplify small in-plane displacement into large out-plane rotation movement; this is needed to operate our new variable optical attenuator devices.