Mitutoyo Corporation, a leading manufacturer of full range of precision measuring instruments, supports worldwide clients by supplying calipers, micrometers, indicators, multi-coordinate measuring machines, vision measuring machines, optical measuring instruments, profile measuring instruments, and sensors and scales that are to be built in various manufacturing and inspecting systems in the precision industry. Recently, as being witnessed in semiconductor industries, advanced precision measuring instruments having ultra high resolution and accuracy are requested. Accordingly, it is required to provide further higher precision calibration systems that can evaluate and calibrate the accuracy of such ultra precision scales and encoders that are used in the above-mentioned advanced precision measuring instruments. Mitutoyo Corporation, thanks to the long-time experience of producing not only precision linear scales and multi-coordinates measuring machines but also one- or multi-axis length measurement systems for evaluation and calibration, has developed a further high precision line scale calibration system that should satisfy the above-mentioned demands. The calibration system has the maximum measuring range of 1,600 mm for evaluating and calibrating scales, encoders, length standards, etc. It is equipped with a vacuum tube through which the laser-interferometric beam passes, so that the uncertainty of calibration is improved. The principle, constructions, and results of calibration are described in this paper.
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