Preparation of the double-sided YBa_2Cu_3O_7- delta thin film by hot-wall type mocvd

摘要

A hot-wall type metal organic chemical vapor deposition (MOCVD) apparatus has been developed for the deposition of the YBa_2Cu_3O_7- delta (YBCO) films using liquid metal organic sources on arbitrary shaped substrates. By improving the reactor shape and gas flow of the source materials, we succeeded in fabricating the double-sided YBCO films for electronic and microwave devices and the YBCO-coated conductor on oxide fiber for power applications. T_c(zero)'s of the YBCO film on both sides of the LaAlO_3(100) substrate were 90 K and 86K, respectively. The films on the facet of the single crystalline SrTiO_3 fiber showed the single phase c-axis orientation with biaxially alignment in the a / b plane.