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Ellipsometry for correctly determining the void fraction and true refractive index of thin films

机译:用于正确确定薄膜的空隙分数和真正折射率的椭圆形测定法

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Using two measurements in vacuum and under condition for condensing water, one might more correctly determine the true refractive index N$-true$/ and porosity Q with Bruggeman's EMA. The characteristics of chamber-attachment to ellipsometer, algorithm and application samples of new method for SiO$-2$/, ZrO$-2$/, HfO$-2$/, a-C:H, and In$- 2$/O$-3$/-SnO$-2$/ films are presented. It is found that the differences between measurements of an effective refractive index N$-ef$/ in air, in vacuum and with condensed water may be up to 0.09. The void fraction for these films are range from 0 to 0.277, Difference between N$-true$/ and N in air may be up to 0.036.
机译:在真空中使用两次测量和在冷凝水的条件下,可以更正地确定真正的折射率N $ - 努力$ /和孔隙度Q与Brugmeman的EMA。椭圆升降仪,SiO $ -2 $ /,ZrO $ -2 $ /,HFO $ -2 $ /,AC:H和$ - 2 $ / o的腔室附件的特点,算法和应用样本。 $ -3 $ / - SNO $ -2 $ /电影。结果发现,在真空和冷凝水中测量有效折射率N $ /在空气中测量的差异可以高达0.09。这些薄膜的空隙级分的范围为0至0.277,空气中的N $ -True $ /和N之间的差异可能高达0.036。

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