We report on recent developments and current state of art of PTB measurement capabilities on one- and two-dimensional material measures of length like e.g. line scales or photomasks as well as length measuring systems like e.g. laser interferometers or linear encoder systems. The talk will describe the instrumentation developed and used at the PTB to perform high precision length measurements with uncertainties in the nanometer range. For instance the newly developed nanometer comparator is designed to obtain measurement uncertainties of about 5 nm on 1Dobjects with dimensions up to 600 mm. Different 1D and 2D-comparators with variations of detection systems, environment and type of displacement measurement are used for systematic investigations in length metrology as well as for calibration services.
展开▼
