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UV-written directional couplers in silica on silicon

机译:硅中二氧化硅的紫外线定向耦合器

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Photosensitivity in Ge-doped silica is a well-known effect used for the fabrication of fiber Bragg gratings. Because the UV-induced index change of hydrogen-loaded Ge-doped silica films can be made larger than 0.0001, the direct writing of channel waveguides is possible. Channel waveguides~(1,2) and couplers~4 can be patterned in this way with a mask brought in contact with the film. However, defining the channel waveguides with a tightlyfocussed UV-beam without a mask yields a more versatile fabrication technique for photonic components.~3
机译:GE掺杂二氧化硅中的光敏性是用于制造纤维布拉格光栅的众所周知的效果。因为氢负载的GE掺杂二氧化硅膜的UV诱导的指数变化可以使得大于0.0001,所以通道波导的直接写入是可能的。通道波导〜(1,2)和耦合器〜4可以以这种方式与与薄膜接触的掩模进行图案化。然而,用没有掩模的无密室的UV光束定义通道波导,为光子元件产生更通用的制造技术。〜3

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