35.2: Integrated Assembly of Miniature Liquid-Crystal-on-Silicon Displays

摘要

We present a new integrated assembly process for miniature liquid-crystal-on-silicon displays using a photo-definable resin. Spin coating defines the cell gap, patterning defines the cell perimeter and spacers, and thermocompression bonding provides the adhesion. We summarize the assembly process and results on liquid crystal test cells.