Supercritical carbon dioxide solvent extraction from surface-micromachined micromechanical structures

摘要

Results are presented supporting the use of supercritical carbon dioxide (SCCO{sub}2) drying to enhance the yield of surface-micromachined micromechanical devices following the final release etch. The equipment and extraction process of the SCCO{sub}2 system are described, and results of successfully released cantilevered beams and microengines are presented. A new system capable of drying 6" wafers is also described.