Fabrication of an electromagnetic micropump for cerebrospinal fluid shunt

摘要

This paper presents the design and fabrication of a micropump for cerebrospinal fluid shunt. The micropump is to be implanted in hydrocephalus patients, The micropump consist of a corrugated parylene diaphragm and a set of nozzle and diffuser. The electromagnetic force drives the diaphragm. The static or dynamic characteristics of the fabricated devices have been obtained experimentally. The size of the micropump is 14 ×12×8mm{sup}3. The increased flow rate of the micropump is about 50 μl/min at operational range.