We have designed, fabricated, and demonstrated a staticvertical microlens scanner with large static displacement and low(<10V) driving voltage, using silicon-on-insulator (SOI)technology. The unique isolated vertical combdrive sets and thecoupled-torsion flexure design provides for both upward anddownward piston motions and the low driving voltage. Singledirectionaldevices demonstrate maximum static downwarddisplacement of 8 μm at 10 Vdc actuation voltage. Bi-directionaldevices demonstrate vertical actuation from -6.5 μm to +9 μm alsoat sub-10 V. The devices have mechanical resonant frequenciesnear 400 Hz, and when operated at resonance, a verticaldisplacement of up to 55 μm peak-to-peak is achieved at up to 7Vrms. The lens motion shows near pure piston motion with verysmall tilt angle of less than 0.034° and the compensation of the tiltusing an isolated comb bank is demonstrated.
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