Capabilities of existing optical laser pattern generator for large area micro images

摘要

This paper addresses the materials, processes, and equipment required for large area micro pattern generation as used in the fabrication of display devices. We will point out some of the processing problems in obtaining zero defect patterns and the types of equipment available to obtain the desired result. We will define large area micro images as patterns generated on substrates larger than 8 by 8 inches, having geometries smaller than 0.008 inches.