The microstrip filters, such as multipole lowpass filter and multipole bandpass filter, have been designed, fabricated, and characterized. The YBa$-2$/Cu$-3$/O$-7$MIN$delta$/ (YBCO) epitaxial thin films on MgO substrates were grown in situ at 760$DGR@C by pulsed laser deposition. The design of filters in a microstrip configuration and their microwave responses were simulated by microwave design simulator, respectively. The filter patterns on the laser ablated YBCO/MgO film were generated using conventional photolithography and ECR-etching process. The performance of filters was measured as a function of temperature and frequency. Microwave loss properties were superior for the filters patterned from HTS films to the filters fabricated from Au-metal films of the same dimensions.
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机译：微带滤波器，如多极低通滤波器和多极带通滤波器，已经设计，制造和表征。 YBA $ -2 $ / CU $ -3 $ / o $ -7 $ MIN $ /（YBCO）MGO基板上的薄膜在760 $ DGR @ C的原位上生长，通过脉冲激光沉积地发展。微波设计模拟器分别模拟了微带配置中的过滤器的设计及其微波响应。使用常规光刻和ECR蚀刻工艺产生激光烧蚀YBCO / MGO膜上的过滤器图案。测量过滤器的性能作为温度和频率的函数。微波损耗性能优于由HTS薄膜图案化的过滤器，以与相同尺寸的Au-金属膜制成的过滤器。
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