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IC rewiring by laser microchemistry

机译:通过激光微化重新加热

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摘要

ICs interconnection networks can be locally modified using a tightly focused laser beam to induce chemical reactions on the circuit surface. Owing to the precursor used, conductors and insulators can either be etched or deposited within the laser spot. Bertin & Co. have recently developed a line of laser- assisted tools dedicated to VLSI prototypes rewiring. This paper summarizes the tests performed on various technology devices from major IC manufacturers: IBM, STM, and Texas Instruments. The different repair steps and results of the characterization tests are presented.
机译:IC互连网络可以使用紧密聚焦的激光束本地修改,以诱导电路表面上的化学反应。由于所用前体,导体和绝缘体可以在激光点内蚀刻或沉积。 Bertin&Co.最近开发了一系列专用于VLSI原型重新布线的激光辅助工具。本文总结了主要IC制造商的各种技术设备执行的测试:IBM,STM和Texas Instruments。提出了表征测试的不同修复步骤和结果。

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