A micromachined electrohydrodynamic (EHD) injection pump with improved characteristics and a novel method for flow measurement with the same structure are presented. Based on the structure of the EHD injection pump, an improved design with grid distances in the range between 10 mu m and 60 mu m was achieved, yielding a reduction in the required driving voltage. Grid areas of 2.5*2.5 mm/sup 2/ and 1*1 mm/sup 2/ were accomplished. The outer dimensions of the smallest pumps are 3*3*1.0 mm/sup 3/. One of the grids is etched back from the frontside and mounted upside down on the lower grid in order to reduce the grid distance. The two grids are bounded together by anodic bonding. The pump is mounted in a ceramic housing with two fluid ports. Based on this structure, a novel method for the measurement of fluid flow and velocity was developed. This technique is well suited for small flow rates below 100 mL/min down to some mu L/min. Volumetric flow rates down to 8 mu L/min were measured with a 2.5*2.5 mm/sup 2/ grid area.
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机译：提出了一种具有改进特性的微机械电流（EHD）喷射泵和具有相同结构的流动测量的新方法。基于EHD喷射泵的结构，实现了10μm和60μm范围内的具有栅极距离的改进设计，从而降低所需的驱动电压。完成2.5 * 2.5 mm / sup 2 /和1 * 1 mm / sup 2 /的网格区域。最小泵的外尺寸为3 * 3 * 1.0 mm / sup 3 /。其中一个网格从前面蚀刻回来并在下部网格上倒置，以减少电网距离。两个网格通过阳极键合在一起。泵安装在具有两个流体端口的陶瓷壳体中。基于该结构，开发了一种用于测量流体流动和速度的新方法。该技术非常适合于低于100ml / min的小流量速度至一些MU L / min。用2.5 * 2.5 mm / sup 2 /栅格区域测量降至8μl/ min的体积流量。
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