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Using a Design of Experiment method to improve KDP crystals machining process.

机译:利用实验方法设计改善KDP晶体加工过程。

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摘要

Surface quality is an important issue for KDP crystals implemented in high power lasers. Single Point Diamond Turning is the only way to get the required transmitted wavefront and damage threshold, especially in the UV band of the laser Mégajoule. The aim of the process development was to reach an rms roughness lower than 3 nm using a vertical fly-cutter, an appropriate cleaning equipment and an interferometric microscope for measurements. A Taguchi Design of Experiment method has been used to optimize the fly-cutting process parameters on 100x100 mm↑(2) KDP crystals.
机译:表面质量是在高功率激光器中实现的KDP晶体的重要问题。单点钻石转动是获得所需的发射波前和损坏阈值的唯一方法,尤其是在激光Mégajoule的UV频段中。过程开发的目的是使用垂直飞刀,适当的清洁设备和干涉测量显微镜来达到3nm的RMS粗糙度。实验方法的Taguchi设计已被用于优化100x100mm↑(2)KDP晶体上的飞行过程参数。

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