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Digital holography for evaluation of the refractive index distribution externally induced in semiconductors

机译:数字全息术,用于评估半导体外部诱导的折射率分布

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In this paper, we analyse the capabilities of the digital holographic approach for evaluation of the refractive index distribution appearing in semiconductor materials due to external optical excitation. The study is based on a modified transmission Mach-Zehnder holographic microscope operating in the near-infrared spectral range. Practical considerations for holographic characterization of semiconductor samples are discussed. Experimentally measured data are compared with simulations as well as approaches to interpretation of the retrieved data are covered.
机译:在本文中,我们分析了由于外部光学激发而评估了半导体材料中出现的折射率分布的数字全息方法的能力。该研究基于在近红外光谱范围内操作的改进的传输Mach-Zehnder全息显微镜。讨论了半导体样本的全息表征的实践考虑。将实验测量数据与模拟进行比较,以及覆盖检索数据的解释方法。

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