We present a phase compensation method for an optical phased array (OPA) to manipulate a sharply definedoptical beam. Undesirable initial phase distribution caused by non-uniformity of fabrication processes andvariation in the characteristics of phase shifters is measured by utilizing phase-shifting digital holography, wherea light wave from a waveguide in arrayed waveguides is used as a reference wave and light waves from the otherwaveguides are used as object waves. The initial phases can be compensated by using the measured resultwithout falling into local optimal solutions. A numerical simulation showed that the initial phases were correctlymeasured and compensated by using the proposed method. Applications of the proposed compensation methodto a fabricated OPA with 16-channel electro-optic polymer waveguides results in obtaining a sharply definedoptical beam.
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