Application of glass 3D printing using direct laser melting for fabrication of photonic sensors

摘要

In this paper, we report our recent research progresses on the design, fabrication and characterization of photonicsensors for harsh environment applications, with the help of novel Integrated Additive and Subtractive Manu-facturing (IASM) system. Glass 3D printing with direct laser melting process in this IASM system presents thedimension accuracy on the order of tens or hundreds of microns. The addition of laser micromachining allowsthe fabrication of structures with micron dimension accuracy, showing the unique advantage of IASM systemin high dimensional accuracy compared with traditional 3D printing process. A number of photonic sensorsand devices will be summarized and presented, including (1) 3D printed all-glass fiber-optic pressure sensor forhigh temperature applications, (2) Information integrated glass module fabricated by IASM and (3) IASM formicrouidic pressure sensor fabrication.