A single particle three dimensional Monte Carlo model of a periodic array of inductively coupled plasmas is presented in the paper. Analytical calculations show that in such sources the periodic field structure produces certain electron resonances in velocity space. The effect is confirmed also by a simple numerical model. The goal of the current work is to develop a more sophisticated model taking into account not only the electric radiofrequency field but also the magnetic field and the decrease of the field intensity with the distance from the antenna. The aim of the model is in calculating the electron energy distribution function. The model is validated by comparison with known analytical results.
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