Process Gas Ar Flow Usage Reduction in Aerosol Cleaning(PPT)

摘要

1. Background 1.1 Particle Removal in Cryogenic Aerosol Cleaning 1.1.1 Effect of process gas on particles 2. Methods 2.1 Throughput Improvements on Ar Aerosol Cleans 2.1.1 Tuning recipe parameters 2.1.2 Ar flow usage reduction, process time & throughput 3. Pesults 3.1 Throughput Improvements on Aerosol clean @GLOBALFOUNDRIES 3.1.1 UPH gain and saving (14 nm).