Towards 3-Axis FM Mems Gyroscopes: Mechanical Design and Experimental Validation

摘要

Frequency Modulation (FM) has been studied as an innovative working principle for Micro-Electro-Mechanical Systems (MEMS) gyroscopes and as a smart solution for the scale factor stability against environmental fluctuations. In this work, three tuning-fork structures are proposed for a yaw, pitch and monolithic 3-axis FM gyroscope, respectively. Preliminary experimental measurements of the scale factors of the FM gyroscopes prove the expected behavior of the devices. In particular, in this work we show the first experimental proof of a monolithic 3-axis FM gyroscope.