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Effect of Anti-blocking Particles on Oxygen Transmission Rate of SiO_x Barrier Coatings Deposited by PECVD on PET Films

机译:防粘连颗粒对PET膜上PECVD沉积SiO_x阻隔涂层透氧率的影响

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摘要

The influence of the surface morphology of semicrystalline poly(ethylene terephthalate) (PET) substrate films on oxygen transmission rate (OTR) and on mechanical properties of ultra thin oxide coatings is analyzed, with attention paid to the role surface defects initiated by anti-blocking particles. Nanometer thick SiO_x coatings are deposited by PECVD on three grades of PET films containing predetermined surface defect densities ranging from 300 to 1800-mm~(-2). Coating failure is shown to be initiated at defect sites and leads to a decrease of the crack onset strain by a factor of 20% and a loss of barrier by a factor of 3. The failure mechanisms of coatings are determined by means of fragmentation tests and the results are modelled using a constant interfacial strength approach with a Weibull-type probability of fracture.
机译:分析了半结晶聚对苯二甲酸乙二酯(PET)基底膜的表面形态对氧气透过率(OTR)和超薄氧化物涂层的机械性能的影响,并着重注意了由抗粘连引发的表面缺陷的作用粒子。通过PECVD将纳米级的SiO_x涂层沉积在三种级别的PET薄膜上,这些薄膜具有预定的表面缺陷密度,范围从300到1800mm〜(-2)。涂层失效被证明是在缺陷部位开始的,导致裂纹开始应变降低了20%,屏障损失降低了3倍。涂层的失效机理是通过碎裂试验确定的。使用恒定界面强度方法对模型进行建模,并采用Weibull型断裂概率。

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