Large-area 400-mm class coating through the mass-production scale of a filtered cathode vacuum arc system

摘要

To achieve the mass-production efficiency of hard coating, the thickness uniformity of a large area as well as a high deposition rate are critical. For these reasons, modem coating systems have been developed to achieve high-quality coating films. In our previous study, a filtered cathode vacuum are system (FCVA) was introduced for tribology applications. We were able to grow thick ta-C coating up to 9 μm in thickness using FCVA at a lab scale. The main technologies used to reach this thickness level were controls of temperature and residual stress through coating. In the present study, we further develop our coating system for mass production scale by using multi-carbon cathodes and a large-area coating method.