QCL seeded, ns-pulse, multi-line, CO_2 laser oscillator for Laser-Produced-Plasma Extreme-UV source

摘要

Successful merger of state-of-the-art, semiconductor quantum-cascade lasers (QCL), with the mature CO_2 laser technology, resulted in a delivery of highly-desired qualities of CO_2 laser output that were not available previously without much effort. These qualities, such as multi-line operation, excellent spectro-temporal stability and pulse waveform control, became available from a single device of moderate complexity. This paper describes the operation principle and the unique properties of the solid-state seeded CO_2 laser, invented for an application in laser-produced-plasma (LPP), extreme-UV (EUV) light source.