Analysis of material removal characteristic of hydrodynamic effect polishing with revolution-rotation condition

摘要

Hydrodynamic effect polishing (HEP), a non-contact polishing process, can remove the surface/subsurface damage effectively and realize the surface roughness at atomic level. However the HEP process put extremely high demand on the movement accuracy of the polishing equipment. Simulations results show movement errors of the axes will directly affect the polishing effect. There exist tiny polishing marks on the HEP processed surface, and these marks will restrict the improvement of surface quality. The movement and shape errors will cause shear stress and hydrodynamic pressure fluctuation on the workpiece surface, and then the fluctuation are duplicated on the processed surface. The fluctuation can be homogenized with the introduction of revolution movement, and then the tiny polishing marks can be depressed. Material removal characteristic of the HEP with revolution movement has been analyzed. 3D fluid dynamic simulation was conducted under different rotational and revolutionary with different polishing clearance. The analysis will give positive instructions on optimization of the HEP equipment.