HVCMOS Pixel Detectors First Measurements on the Reticle Size Prototype for the ATLAS Pixel Layers

摘要

High-Voltage CMOS (HVCMOS) pixel sensors are depleted active pixel sensors implemented in standard commercial CMOS processes. Thanks to its radiation hardness and fast signal generation HVCMOS pixel sensors will be used, or are proposed, for several experiments: Mu3e [2], ATLAS [3], CLIC [4]. In 2015, the first reticle size HVCMOS sensor has been fabricated on high resistive substrates as a part of the ATLAS pixel demonstrator project. This article presents a summary of the measurements conducted by KIT ADL group.