Modeling of the Dielectric Barrier RF Discharge at Atmospheric Pressure

摘要

one dimensional hybrid modeling of the dielectric barrier radio frequency (DBRF) discharge at atmospheric pressure in argon is performed. Electrons in this model are described in kinetic way and heavy species in hydrodynamic way. Electron density, capacitive power deposition and electrons temperature distributions in the discharge gap for low and high current modes of the DBRF discharge as well as volt-ampere characteristics of DBRF discharge are calculated. The differences between radio-frequency discharge with bare electrodes and DBRF discharge are established.