Al and Ga Nanoparticles Array Deposited on Silicon by UTAM for Sensors Applications

摘要

Highly order array of Al and Ga nanoparticles have been synthesized by controlling the size pores of Ultra Thin Alumina Membranes masks (UTAMs) produced by anodic alumina, the deposition of array was carried out on the silicon substrate, the roughness and the size distribution of Al and Ga nanoparticles has been investigated, also shown how to organize into order 3Dstructures. The AFM results show that the prepared films have nano dimensions, pores and have large surface area which increasing the probability of gas, chemical and /or photon interaction then they could be employed for sensing device fabrication.