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Modeling of MEMS based capacitive micromachined ultrasonic transducer array element at static voltage

机译:基于MEMS的电容式微机械超声换能器阵列元件在静电电压建模

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Capacitive Micromachined Ultrasonic Transducers (CMUTs) are used to receive and transmit ultrasonic waves. The device is constructed from many small, in the order of microns, circular membranes, which are connected in parallel. In this paper, static voltage analysis of CMUT has been modeled and described. The membrane displacement with respect to various parameters such as radius, membrane thickness, gap thickness and applied static bias has been analyzed. By consideration of Mason's analysis, the equation of motion of membrane under tension has been discussed. The graphical results support the theoretical modeling of the CMUT cell.
机译:电容式微机械超声换能器(CMUT)用于接收和传输超声波。该装置由微米,圆形膜的顺序构造出来,并联连接。本文采用了模拟和描述了CMUT的静态电压分析。已经分析了关于诸如半径,膜厚度,间隙厚度和施加的静态偏压的各种参数的膜位移。通过考虑梅森的分析,已经讨论了膜下膜的运动方程。图形结果支持CMUT细胞的理论建模。

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