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SIMULATION STUDIES OF SUB-MICROMETER CONTACT OF TOPOGRAPHY STYLI

机译:仿真技术仿真技术仿真研究

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摘要

The contact of small probe-tip against a surface is crucial to stylus-based surface roughness metrology, which remains a popular and important practical technique for both industry use and basic research. This discussion paper focusses on simulation studies intended to improve metrological understanding (although it might have other micro-tribology applications). A finite stylus reduces measurement fidelity through direct geometrical effects, elastic distortion and dynamical effects that vary the contact force, sometimes to lift-off.
机译:小探头尖端对表面的触点对触针的表面粗糙度计量至关重要,这仍然是行业使用和基础研究的流行和重要的实用技术。本讨论案文件侧重于旨在提高计量理解的仿真研究(尽管它可能具有其他微摩擦学应用)。有限触控笔通过直接几何效果,弹性变形和改变接触力的动态效果来降低测量保真度,有时剥离。

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