The contact of small probe-tip against a surface is crucial to stylus-based surface roughness metrology, which remains a popular and important practical technique for both industry use and basic research. This discussion paper focusses on simulation studies intended to improve metrological understanding (although it might have other micro-tribology applications). A finite stylus reduces measurement fidelity through direct geometrical effects, elastic distortion and dynamical effects that vary the contact force, sometimes to lift-off.
展开▼