Low aspect ratio micron size tunnel magnetoresistance sensors with permanent magnet biasing integrated in the top lead

摘要

Optimized single magnetic bead detection requires magnetic sensors with an improved field detection limit and a sensor area matching the bead cross section (micron size spatial resolution). This work shows that square micron sized tunnel magnetoresistance sensors can be fabricated with integrated longitudinal permanent magnet (PM) biasing that show a linearized field response and low noise.