Study of Micro Roughness Parameters and Growth Characteristics of NbC/Si Multilayer using Layer by Layer Power Spectral Density Analysis

摘要

Analysis of atomic force microscopy data measured over extended length scale gives an opportunity to calculate power spectral density (PSD) and in turn micro roughness parameters over large spatial frequency range. The surface PSD function can be used to calculate the layer by layer PSD in the multilayer stacks. In the present study, information obtained so is used to analyze surface/interface imperfections in the NbC/Si multilayer over wide spatial frequency range using the topographic measurements by atomic force microscopy (AFM) technique. Inputs of growth characteristic obtained so have helped to grow a good quality NbC/Si multilayer as tested using reflectivity beamline on Indus-1 Synchrotron facility.