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83 W, 1 ns, 3.1 MHz all-fiber laser for micromachining

机译:83 W,1 NS,3.1 MHz全光纤激光器用于微机芯

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Fiber lasers are commonly used for various material processing applications. The advantages (such as simplicity of the system, high material removal rate) and disadvantages (larger heat-affected zone, reduced precision) of nanosecond pulses over sub-picosecond pulses are well known. Here, we report on a simple, all-fiber-integrated fiber laser generating 1-ns-long pulses. This duration is long enough that sustained plasma formation should lead to efficient ablation, but short enough to limit the heat-affected zone (HAZ). The oscillator operates in a commonly encountered, but usually ignored mode, producing stable pulses, which cannot be compressed to transform limit [1]. An all-fiber-integrated oscillator with a nonlinear optical loop mirror (NOLM) seeds an all-fiber-integrated Yb-fiber amplifier (core diameter of 25 μm, cladding diameter of 250 μm) at a repetition rate of 3.1 MHz (Fig.1). Fig. 2 shows the optical spectrum at various output powers. The growing influence of Raman amplification is evident, confirming the high peak power of the source. The pulse duration is measured with a sampling scope to be 0.9 ns, unchanged at all power levels. The maximum output power is 83 W, corresponding to ~26 μJ of pulse energy and 25 kW of peak power. The RF spectrum is free of modulations down to -70 dBc. The short-term power stability of the pulse trains obtained directly from the oscillator and at the full power of the amplifier are characterized by their integrated (over the range 3 Hz - 250 kHz) relative intensity noise using the standard method [2] to be 0.6% and 1.86%, respectively. In order to test the utility of this system for material processing, we used a galvo scanner, followed by an f-theta objective, which focuses the beam to a spot size of 20 μm. As target, we used polished titanium surfaces. For this target, only 2 W of average power was sufficient. For comparison, we used an industrial fiber laser producing 70 ns-long pulses and a homebuilt fiber chirped-pulse amplifier (CPA), which delivers 20 ps-long pulses without external compression. SEM analysis of the processed samples reveals that the HAZ is significantly reduced compared to the nanosecond system, and nearly the same as that of the 20-ps system.
机译:纤维激光器通常用于各种材料处理应用。的优点(诸如系统,高的材料去除速率的简单)在亚皮秒脉冲纳秒脉冲的和缺点(较大的热影响区,降低的精度)是众所周知的。在这里,我们报告了一个简单的全光纤集成光纤激光器产生1-ns长脉冲。这种持续时间足够长,即持续的等离子体形成应该导致有效的消融,但足够短,以限制热影响的区域(HAZ)。振荡器在通常遇到但通常被忽略的模式下运行,产生稳定的脉冲,这不能被压缩以变换限制[1]。具有非线性光学回路镜(NOLM)的全纤维集成振荡器(NOLM)种子以3.1MHz的重复速率将全纤维集成的YB光纤放大器(核心直径为250μm)(图。 1)。图。图2示出了各种输出功率的光学频谱。拉曼扩增的越来越大的影响是显而易见的,确认源的高峰功率。使用采样范围测量脉冲持续时间为0.9ns,在所有功率水平上不变。最大输出功率为83W,对应于〜26μj的脉冲能量和25kW的峰值功率。 RF光谱没有调制至-70 dBc。直接从振荡器获得的脉冲列表的短期功率稳定性和放大器的全功率的特点是它们使用标准方法[2]的相对强度噪声集成(在3 Hz-250 kHz)相对强度噪声。分别为0.6%和1.86%。为了测试该系统的实用性进行材料处理,我们使用了一个GALVO扫描仪,然后是F-THETA目标,将光束聚焦到光斑尺寸为20μm。作为靶标,我们使用了抛光钛表面。对于这个目标,平均力量只有2 W就足够了。为了比较,我们使用了工业光纤激光器产生70 ns长脉冲和房屋纤维啁啾脉冲放大器(CPA),其提供20个PS长脉冲,而无需外部压缩。对处理后的样品的SEM分析显示,与纳秒系统相比,HAZ显着降低,以及与20-PS系统的几乎相同。

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